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Solutions for Semiconductor/MRAM
Magnetic Annealing Systems for processing MRAM and magnetic tunnel junctions (MTJ) used in next generation non-volatile memory chips.
MRAM an emerging non-volatile memory chip which could ultimately replace other types of memory such as FLASH, SRAM and DRAM has been in development for several years and is now about to go into production.
Introducing the MRT series
The MRT Series is the leading magnetic annealing sytems using permanent and superconducting magnet technology. It is a fully automated magnetic annealing system, delivering optimal device yields, highest product thoughput, and extremely low cost of ownership.
The MRT1000 uses permanent magnets to generate very uniform and homogenous magnetic fields. Designed for MRAM production where its reliability and high wafer throughput make it an ideal high volume manufacturing tool.
When higher fields up to 10.0 Tesla in magnetic field strength are required the MRT Series uses leading edge super-conducting magnet technology, with closed loop cryogen system to generate the high magnetic fields required in the processing of GMR /TMR thin film layers used in the production of today's high density read /write heads for hard disk drives. The MRT2000 and MRT5000 systems are examples of this type of system.
Also available from Magnetic Solutions is the MATr Series, an advanced magnetic annealing tool for Research applications.
Related links
More about MRT1000
More about MRT2000/5000
Contract service
About our contract wafer annealing service
Research solution
The MATr series provides a research scale magnetic annealing solution
Downloads (Acrobat PDF)
MATr 1000_82 brochure (108K)
MATr 5000_282 brochure (168K)
MRT Series brochure (544K)
MRT1000 drawings (176K)
MRT2000 drawings (132K)
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