MRT5000 - 5 Tesla Magnetic Annealing Tool
Thin Film Head Production
The MRT5000 tool is a fully automated, high field magnetic annealing tool for 150mm and 200mm wafer sizes that provides unrivalled throughput in a robust production platform.
The tool incorporates Magnetic Solutions patented high throughput oven technology for large wafer batches of up to 50 wafers. With operating temperatures up to 600 C, the oven provides high accuracy thermal control to within 1 C in a clean processing environment. Differential cooling of two chambers within the oven achieves fast thermal cool-down under high vacuum or inert gas conditions, providing shorter processing times and increased throughput. The medium loss design of the oven provides fast response at all stages of the thermal process with flexibility to accurately control ramp rates, overshoot, settlings times, set-point accuracy and thermal uniformity at soak. A closed cycle superconducting magnet provides a fully variable field up to 5 Tesla. The magnet coil is cooled by twin cryogenic compressors that retain a reservoir of liquid He in the cryostat. This provides excellent thermal stability for the magnet coil and reliable long term operation of the tool. This design also allows the magnet to carry out back-to-back runs without any dwell time in between, further enhancing throughput in production.
This robust superconducting magnet design, combined with the fast processing time of our patented oven technology, results in unsurpassed wafer throughput and tool up-time. This has established the MRT5000 as the production standard for high field magnetic annealing of thin film heads.
The tool is provided with a wide range of features for greater utility and flexibility in a production environment including; cassette-to-cassette wafer handling, automatic pre-alignment of wafers, touch screen operator interface, data and event log recording, SEMI standard software GUI and recipe management. The MRT5000 can be supplied with a wide range of process configurations and options allowing the tool specification to be matched to customers’ production requirements.
