MRT Series - 300 Magnetic Annealing Tool
STT-RAM Development and Production
The MRT/300 is a high field magnetic annealing tool for 300mm wafers, that provides unrivalled throughput in a robust production platform. The tool is supplied in two configurations with magnetic fields up to 5 Tesla (MRT5000/300) and up to 2 Tesla (MRT2000/300) and with batch sizes of up to 100 wafers. Higher magnetic fields are available subject to customer process requirements. The tool incorporates Magnetic Solutions patented high throughput oven technology for large wafer batches. With an operating temperature up to 600 C, the oven provides high accuracy thermal control to within 1 C in a clean processing environment. Differential cooling of two chambers within the oven achieves fast thermal cool-down under high vacuum or inert gas conditions, providing shorter processing times and increased throughput. The medium loss design of the oven provides fast response at all stages of the thermal process with flexibility to accurately control ramp rates, overshoot, settlings times, set-point accuracy and thermal uniformity at soak. A closed cycle superconducting magnet provides a fully variable field up to 5 Tesla. The magnet coil is cooled by twin cryogenic compressors that retain a reservoir of liquid He in the cryostat. This provides excellent thermal stability for the magnet coil and ensures reliable long term operation of the tool. This design also allows the magnet to carry out back-to-back runs without any dwell time in between, further enhancing throughput in production.
Wafers can be annealed with either a parallel or transverse orientation to the magnetic field direction. Wafer orientation is a selectable parameter in the tools recipe management software and no hardware modifications are required when changing from one orientation to the other.
MRT/300 tools can be supplied in a bridge tool configuration allowing processing of 200mm and 300mm wafers. A range of options are provided that allow the customer to match their process needs and budget with the tool configuration.
