MRT200/400 - Up to 0.4 Tesla Magnetic Annealing Tool
Thin Film Head Production
The Magnetic Solutions MRT200/400 is a modular platform for magnetic annealing of wafers up to 200mm in size at fields up to 0.4 Tesla and at temperatures up to 600 C. A range of compact permanent magnets provides options for fixed fields of up to 0.4 Tesla.
The magnet incorporates a passive, self shielding design that minimizes the stray magnetic field footprint of the tool, allowing the installation of multiple tools in close proximity for volume production. The magnet requires no maintenance, contributing to the high uptime and reliability of the MRT200/400 design. The tool incorporates Magnetic Solutions patented high throughput oven technology for large batches of up to 50 x 200mm wafers. With an operating temperature up to 600 C, the oven provides high accuracy thermal control to within 1 C in a clean processing environment. The medium loss design of the oven provides fast response at all stages of the thermal process with flexibility to accurately control ramp rates, overshoot, settlings times, set-point accuracy and thermal uniformity at soak.
The tool can be supplied with a single process module comprising a compact permanent magnet and vacuum oven or can be configured with multiple process modules. Product can be manually or automatically loaded, with a single wafer handling robot addressing all process modules. This design provides high wafer throughput in a compact package, incorporating unrivalled process flexibility and reliability.
Tool Layout
Enclosure cut away for clarity of presentation
- Compact permanent magnet with passive shield for low stray field footprint
- Quartz lined vacuum oven with multi-zone heating elements. Provides low contamination environment and high wafer throughput
- Wafer transfer stage with option for manual loading and for automated in process wafer positioning from -180 degrees to +180 degrees
