MRT1000 - 1 Tesla Magnetic Annealing Tool

MRAM Development and Production

The MRT1000 has been the industry standard for magnetic annealing of MRAM devices for many years. It is a robust production platform that combines unrivalled process flexibility with high wafer throughput.

A compact permanent magnet provides a fixed field of 1.0 Tesla. The magnet incorporates a passive, self-shielding design that minimizes the stray magnetic field footprint of the tool, allowing the installation of multiple tools in close proximity for volume production. The magnet requires no maintenance, contributing to the high uptime and reliability of the MRT1000 design. The tool incorporates Magnetic Solutions patented high throughput oven technology for large wafer batches of up to 50 x 200mm wafers. With an operating temperature up to 600 C, the oven provides high accuracy thermal control to within 1 C in a clean processing environment. The medium loss design of the oven provides fast response at all stages of the thermal process with flexibility to accurately control ramp rates, overshoot, settlings times, set-point accuracy and thermal uniformity at soak.

The tool is provided with a wide range of features for greater utility and flexibility in a production environment including; cassette-to-cassette wafer handling, automatic pre-alignment of wafers, touch screen operator interface, data and event log recording, SEMI standard software GUI and recipe management. The MRT1000 can be supplied with a wide range of process configurations and options allowing the tool specification to be matched to a customer’s production requirements.