MATr

MATr - Up to 10 Tesla Magnetic Annealing Tool

Process Development & Low Volume Pilot Line / Laboratory Usage

The Magnetic Solutions MATr offers a range of flexible magnetic annealing tools for process development and low volume production. The tool is provided in three configurations with magnetic fields up to 10 Tesla (MATr10000), 5 Tesla (MATr5000) and 2 Tesla (MATr2000). MATr tools incorporate Magnetic Solutions patented oven technology with high accuracy thermal control to within 1 C in a clean processing environment. Reproducible process development is achieved with a median loss oven design that provides the flexibility to accurately control ramp rates, overshoot, settling times, set point accuracy and thermal uniformity at soak.

A closed cycle superconducting magnet provides a fully variable magnetic field in a compact package. Active magnetic shielding is used to minimize the mass and stray field footprint of the tool, making it suitable for installation in laboratory environments.

MATr tools are used for a wide range of applications including;

  • MRAM and spintronic devices
  • Thin film heads for disk drives
  • Magnetic sensors
  • Patterned media
  • Magneto-caloric materials
  • High permeability alloys for transformer and inductor applications

The tool can supplied in a wide range of configurations suitable for efficient batch processing of sample types including; wafers, coupons, media platters and metallic ingots. A range of options are provided that allow the customer to match their process needs and budget with the tool configuration.

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