Major MRAM Developer

Magnetic Solutions was contracted to deliver a new specification of high field magnetic annealing tool to support an MRAM development program being undertaken by a subsidiary of a Japanese multinational corporation. The project called for development and delivery of a 50 wafer batch magnetic annealing tool solution, with a magnetic field strength up to 2 Tesla, in a robust, production ready platform. The project was delivered in less than 12 months and involving a number of new design challenges. These included,

• the design and testing of a specialised superconducting magnet coil with increased magnet uniformity over a large wafer batch
• the development of enhancements to our high vacuum oven technology that enabled a significant increase in tool throughput.

The resulting tool configuration exceeded the customers target metrics for wafer throughput using their production POR and met all of their target process and reliability specifications.